Branson Plasma Etcher

Description:
The Branson is a plasma etcher that can etch many different types of films provided that the appropriate process gases are used. Typically the tool is used to pattern silicon nitride films with CF₄ and O₂ chemistry and the tool is commonly used for descuming the photoresist and other polymers.

Manufacturer: Branson
Model:  DIONEX 3000 SERIES / IPC S 3000 SERIES PLASMA SYSTEM
Operation Procedure
Qualified Users List