Idaho Microfabrication Lab Home
College of Engineering Research Home
Access
Equipment
Processes
Materials
Research
Personnel
Links
Lab Layout
Safety
Training
User Fees
Latest News
DRIE Etcher
Description: Used for through-wafer etching with very high aspect ratios
Manufacturer: Oxford Instruments Model: Plasma Lab System 100 Operation Procedure Qualified Users List
Equipment Maintenance Request
Equipment Reservation Calendar
Lab Sign in
Description:
