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NanoSpec
 Description:
The NanoSpec is a tool
that measures the depth of thin films on
silicon. It can accurately measure film
depths in the range from 100 to 500,000
Angstroms, or .01 to 50 microns. The tool
acts as a diffraction-grating based
spectrometer to measure the reflectance of
films across the spectrum of light from 370
to 800nm wavelengths, and from this data,
together with the known index of refraction
dispersion values for both the film material
and the silicon substrate, extrapolates the
thickness of the film.
Manufacturer: Nanometrics
212 Thin Film Systems
Model: 7200-1453 REV1
Operation Procedure
Qualified Users List
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