| Scanning Electron Microscope (SEM) | |
| Manufacturer: LEO |
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| Model: 1430VP | |
| Operation Procedure | |
| Qualified Users List | |
| Description: Used to measure sub-micron features as well as electronically expose resists. The SEM is also equipped with atomic characterization through an Energy Dispersive Spectrometry (EDS) System from Oxford Instruments. Along with this, the SEM has a Nanometer Pattern Generation System (NPGS) via an E-Beam system manufactured by J.C. Nabity Lithography Systems. |
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