Spin Coater

Description:
This coater is designed for the hand dispensing of resist on a 4" or 6" wafer. The wafer is held to a chuck with a vacuum and the wafer is spun at high speeds to get a uniform coating of the applied film.  The time and speed of the spinning can be programmed with the on-board controller. For a list of the current recipes, click here.

Manufacturer: Headway Research Inc.
Model: PWM 32-PS-R 790
Operation Procedure
Qualified Users List