EQUIPMENT UP/DOWN STATUS
Fabrication |
Characterization
|
| Photolithography Contact Aligner Spin Coater Hot Plate Oven |
Thin Film Measurement Ellipsometer NanoSpec |
| Dry Etch Branson Etcher DRIE Etcher |
Scanning Electron Microscopes SEM FESEM |
| Wet Processing Wet Bench Spin-Rinse-Dryer (SRD) |
Profilometry Stylus Profiler Optical Profiler Automatic 4-point probe |
| PVD CrC150 Sputter Machine Thermal Evaporator Ion Mill AJA Orion Five Sputtering Machine |
Electronics Packaging |
| Thermal Processing Oxidation/Diffusion Furnace RTP |
|
| Chemical Mechanical Planarization Chemical Mechanical Polisher |