Idaho Microfabrication Lab

Branson Plasma Etcher

Manufacturer: Branson
Model:  DIONEX 3000 SERIES / IPC S 3000 SERIES PLASMA SYSTEM

Description:
The Branson is a plasma etcher that can etch many different types of films using O2 chemistry.  Typically the tool is used for de-scuming photoresist.


Operation Procedure