Ellipsometer
Manufacturer: Gaertner Scientific Corp.
Model: L115 C-8
Description:
Used to measure film thickness and refractive index of thin films. 100mm – 200mm wafer sizes. GEMP software.
Operation Procedure
Manufacturer: Gaertner Scientific Corp.
Model: L115 C-8
Description:
Used to measure film thickness and refractive index of thin films. 100mm – 200mm wafer sizes. GEMP software.
Operation Procedure