Manufacturer: Dektak
Model: V200 Si
Description:
Stylus profiler for up to 200mm substrates. Range 0.3-30mg stylus force. Programmable 200mm stage with 8″x8″ XY travel and 360 degree rotation. Remote controlled video camera with 60x-420x zooom range, vertical range 25A to 2620A, vertical resolution 1A@6kA. Profilometer is used to profile the surface of the wafer. It does so by scanning the surface of the sample/wafer with stylus. It can be used to measure etch depths, thickness of photoresist and surface roughness.
Operation Procedure