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Rapid Thermal Processing Oven (RTP)


Manufacturer: Modular Process Technology Corp.
Model: RTP 600-S

Description:¬† The RTP-600S system is a benchtop rapid thermal processing system. It has multi-gas capabilities and can process wafers up to 6″ in diameter. It can be used for implant activation, contact alloying and silicide formation.¬† Graphite tooling.