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Spin-Rinse-Dryer (SRD)


Manufacturer: Semitool
Model: ST-460
Operation Procedure


Description:
 Designed to provide DI rinsing and Nitrogen drying of silicon wafers.  Surface contaminants that reside on the wafers are flushed away in the DI rinse stream.  There are two modes available for SRD operation.  100mm wafer tooling.