Manufacturer: CHA Industries, Inc.
Model: Thermal Evaporator
Description: The thermal evaporator uses resistive energy to evaporate thin films onto a given substrate. It can deposit materials with a specified thickness of up to 1500 nanometers. The thickness is controlled by the use of a quartz crystal monitor. Three 8″ wafers can be processed simultaneously and tooling is being developed for additional sizes. Up to three different layers may be evaporated in one run.