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Idaho Microfabrication Lab

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Processes

Simple Wafer Cleaning

Electron Beam Lithography

Equipment Characterization

NMOS Process Flow

NMOS Process Flow – animation (courtesy of BYU)

Oxidation/Diffusion

Idaho Microfabrication Lab | pmiranda@boisestate.edu | (208) 426-5713 | RUCH 105, 106, 107

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