Master of Science Materials Science & Engineering
Master of Engineering Materials Science & Engineering
CHEM 401G ADVANCED INORGANIC CHEMISTRY (3-0-3)(F)
Atomic structure, molecular structure using valence bond and molecular orbital theories, elementary group theory, transition metal coordination chemistry, acids and bases, descriptive transition and non-transition metal chemistry. PREREQ: CHEM 322 or PERM/INST.
EE 540 INTRO TO INTEGRATED CIRCUIT AND MEMS PROCESSING (3-0-3)(F)
Fundamentals of integrated circuit and micro electromechanical systems (MEMS) fabrication technology; semiconductor substrates; theory of unit processes such as diffusion, oxidation, ion implantation, rapid thermal processing, photolithography, wet etching and cleaning, dry etching, thin-film deposition; chemical mechanical polishing; process integration; metrology; statistical process control; TCAD. COREQ: EE 540L. PREREQ: ENGR 320 or PERM/INST.
EE 540L INTRO TO INTEGRATED CIRCUIT AND MEMS PROCESSING LAB (0-3-1)(F)
Semiconductor cleanroom practices; heavy lab safety; students will fabricate and test simple structures in lab; application of TCAD to practical problems. COREQ: EE 540.
EE 542 PHOTOLITHOGRAPHY (3-0-3)(F/S)
Principles of optics, diffraction, interference, superposition of waves, imaging systems, fundamentals of microlithography, resolution, contact and projection lithography, photoresist processing, metrology. Phase shift masks, anti-reflective coatings, deep-ultraviolet lithography, off-axis annular illumination. Use of TCAD lithography simulation software. COREQ: EE 340.
EE 542L PHOTOLITHOGRAPHY LAB (0-3-1)(F/S)
Cleanroom lab experience utilizing a projection-printing wafer stepper, photoresist wafer track, SEM, and optical metrology equipment. Use of TCAD lithography simulation software. PREREQ: EE 342. COREQ: EE 442.
EE 546 FRONTIERS OF IC PROCESSING (3-0-3)(F/S)
Recent and proposed developments in semiconductor process technology Course modules: Lithography, Deposition, Doping and Etch processes. PREREQ: EE 440/EE540.
MSE 505 BONDING AND STRUCTURE OF MATERIALS (3-0-3) (F/S)
Bonding, atomic arrangements and crystal structures of metals, ceramics, electronic materials and polymers; electronic structure of solids; physical properties of solids; defects in solids; relationship between processing, microstructure and properties of materials, PREREQ: ENGR 245.
MSE 508 SOLID STATE THERMODYNAMICS AND KINETICS (4-0-4)(F/S)
The laws of thermodynamics, fundamental equation for multi-component elastic solids and electromagnetic media, equilibrium criteria. Application to solution thermodynamics, point defects in solids, phase diagrams. Phase transitions, Landau rule, symmetry rules. Interfaces, nucleation theory, elastic effects. Kinetics: diffusion of heat, mass and charge; coupled flows. PREREQ: CHEM 322 or ENGR 320 or PHYS 432.
MSE 510 ELECTRICAL, OPTICAL, AND MAGNETIC PROPERTIES OF MATERIALS (3-0-3)(F/S)
Introduction to the physical principles underlying the electric, optical and magnetic properties of modern solids. Crystalline and energy band structure of materials, thermal properties and electrical conduction in semiconductors and metals, optical and magnetic properties of solids are covered. PREREQ: ENGR 245.
MSE 511 SEMICONDUCTOR MATERIALS (3-0-3)(F/S)
Examination of the physical properties of semiconductors including electronic structure, free carrier statistics, optical properties, crystallography, and defects. Study of thermodynamic properties as related to lattice vibrations and diffusion. PREREQ: ENGR 245.
MSE 512 MECHANICAL PROPERTIES OF MATERIALS (3-0-3) (F/S)
Study of deformation and fracture in engineering materials, including elastic and plastic deformations; dislocation theory; alloy hardening and creep deformation; fracture mechanisms; linear elastic and nonlinear elastic fracture mechanics; toughening of metals, ceramics, and composites; environmentally assisted failure. PREREQ: ENGR 245.
MSE 549 ADVANCED TOPICS IN MATERIALS SCIENCE & ENGINEERING
(3-0-3)(F/S)(Offered on demand)
Selected advanced topics from current research in Materials Science and Engineering such as defects in solids, physics of thin films, nanomaterials, optoelectronics, computational materials science, corrosion, reliability physics. PREREQ: ENGR 245.
PHYS 512 INTRODUCTORY QUANTUM MECHANICS (3-0-3) (F/S)
Introduction to fundamentals of quantum mechanics, including Schroedinger equation, energy levels, angular momentum, electron spin, perturbations, and scattering. Applications, such as tunneling, orbitals, magnetic resonance, and nanoscale effects. PREREQ: PHYS 309.
PHYS 515 SOLID STATE PHYSICS (3-0-3)(F/S)
Quantum physics applied to understanding the properties of materials, including semiconductors, metals, superconductors, and magnetic systems. PREREQ: PHYS 309.
PHYS 523 PHYSICAL METHODS OF MATERIALS CHARACTERIZATION (3-0-3)(S)
Physical principles and practical methods used in determining the structural, electronic optical, and magnetic properties of materials. Course topics will include optical, electron, and scanning microscopies, diffraction, surface analysis, optical spectroscopy, electrical transport, and magnetometry. Individual projects will focus on the application of an analytical technique to solve a specific problem. Prerequisite: PHYS 309 or permission of instructor.
PHYS 530 OPTICS (3-0-3)
Geometrical and physical optics, including lenses, fiber optics, Fourier optics, polarization, interference, diffraction, lasers, and holography. PREREQ: PHYS 212, MATH 333. COREQ: PHYS 534.
PHYS 532 THERMAL PHYSICS (3-0-3)(S)
Discussion of temperature, work, specific heat, and entropy. The laws of thermodynamics are discussed and applied to physical problems. Ideal gases, statistics, Gibbs free energy, and cryogenics. Work on heat transfer of lattice vibrations and phonons will be required. PREREQ: Graduate standing or PERM/INST.
PHYS 534 OPTICS LABORATORY (0-3-1)
Laboratory to be taken concurrently with PHYS 530. Experiments in optics, including optical systems, thick lenses, interference, diffraction, Fourier optics, image processing, and holography. COREQ: PHYS 530.